发明名称 |
CONTACT PRESSURE DETECTION APPARATUS AND CONTACT POINT PRESSURE MEASUREMENT APPARATUS |
摘要 |
To measure contact pressure of each of a plurality of small protrusions arranged at a narrow pitch and contacting a flat surface, provided is a contact pressure detection apparatus comprising a sensor section that is contacted by a target and has pressure applied thereto by the target; a light source section that radiates light with a wavelength causing Raman scattering in the sensor section to which the pressure is applied; and a detecting section that receives light from the sensor section and detects the pressure between the sensor section and the target. Also provided is a contact point pressure measurement apparatus that measures contact pressure of an electrode of a device under test, comprising: a fixing section that has the device under test mounted thereon and fixes the electrode of the device under test in a manner to press against the sensor section; and the contact pressure detection apparatus.
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申请公布号 |
US2013199310(A1) |
申请公布日期 |
2013.08.08 |
申请号 |
US201213717722 |
申请日期 |
2012.12.18 |
申请人 |
ADVANTEST CORPORATION;ADVANTEST CORPORATION |
发明人 |
FUJINO MASAO;HAYAKAWA TOSHIAKI |
分类号 |
G01L1/24 |
主分类号 |
G01L1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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