发明名称 CONTACT PRESSURE DETECTION APPARATUS AND CONTACT POINT PRESSURE MEASUREMENT APPARATUS
摘要 To measure contact pressure of each of a plurality of small protrusions arranged at a narrow pitch and contacting a flat surface, provided is a contact pressure detection apparatus comprising a sensor section that is contacted by a target and has pressure applied thereto by the target; a light source section that radiates light with a wavelength causing Raman scattering in the sensor section to which the pressure is applied; and a detecting section that receives light from the sensor section and detects the pressure between the sensor section and the target. Also provided is a contact point pressure measurement apparatus that measures contact pressure of an electrode of a device under test, comprising: a fixing section that has the device under test mounted thereon and fixes the electrode of the device under test in a manner to press against the sensor section; and the contact pressure detection apparatus.
申请公布号 US2013199310(A1) 申请公布日期 2013.08.08
申请号 US201213717722 申请日期 2012.12.18
申请人 ADVANTEST CORPORATION;ADVANTEST CORPORATION 发明人 FUJINO MASAO;HAYAKAWA TOSHIAKI
分类号 G01L1/24 主分类号 G01L1/24
代理机构 代理人
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