发明名称 |
SYSTEMS AND METHODS FOR SIGNAL AMPLIFICATION WITH A DUAL-GATE BIO FIELD EFFECT TRANSISTOR |
摘要 |
The present disclosure provides a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device may include a substrate; a gate structure disposed on a first surface of the substrate and an interface layer formed on the second surface of the substrate. The interface layer may allow for a receptor to be placed on the interface layer to detect the presence of a biomolecule or bio-entity. An amplification factor of the BioFET device may be provided by a difference in capacitances associated with the gate structure on the first surface and with the interface layer formed on the second surface.
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申请公布号 |
US2013200438(A1) |
申请公布日期 |
2013.08.08 |
申请号 |
US201313831106 |
申请日期 |
2013.03.14 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIU YI-SHAO;BASHIR RASHID;LAI FEI-LUNG;CHENG CHUN-WEN |
分类号 |
G01N27/414;H01L29/66 |
主分类号 |
G01N27/414 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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