INTEGRATED VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM
摘要
vapor transport deposition system and method that includes a vaporizer and distributor unit and at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre- or post-deposition processes.
申请公布号
US2013203202(A1)
申请公布日期
2013.08.08
申请号
US201313754535
申请日期
2013.01.30
申请人
FIRST SOLAR, INC.;FIRST SOLAR, INC.
发明人
XIONG GANG;BARDEN JOHN;LIAO FENG;POWELL RICK C.;JIN CHANGMING
