| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly efficient inspection method of an object to be inspected.SOLUTION: In the inspection method of the object to be inspected, a step of acquiring an image of a plurality of objects to be inspected included in one object-to-be-inspected column, and then acquiring an image of a plurality of objects to be inspected included in another object-to-be-inspected column positioned more on a downstream side in a scanning direction relative to the plurality of objects to be inspected of an imaging apparatus than the one object-to-be-inspected column, and an evaluation step of comparing the acquired images of the objects to be inspected arranged in a second direction in the one object-to-be-inspected column with each other by using the image of the plurality of objects to be inspected included in the one object-to-be-inspected column are executed in parallel. |
