发明名称 |
LIGHT-EMITTING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a flexible semiconductor device by peeling an element produced by a process at a relatively low temperature (lower than 500°C) from a substrate.SOLUTION: A molybdenum film is formed on a glass substrate and a molybdenum oxide film is formed on a surface thereof using an existing apparatus for manufacturing a large-sized glass substrate. A nonmetal inorganic film and an organic compound film are laminated on the molybdenum oxide film, and an element produced by a process at a relatively low temperature (lower than 500°C) is formed on the organic compound film. Then, the element is peeled from the glass substrate. |
申请公布号 |
JP2013153177(A) |
申请公布日期 |
2013.08.08 |
申请号 |
JP20130039028 |
申请日期 |
2013.02.28 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
JINBO YASUHIRO;ISA TOSHIYUKI;HONDA TATSUYA |
分类号 |
H01L51/50;H01L21/02;H01L21/20;H01L21/336;H01L27/12;H01L29/786;H05B33/02;H05B33/14 |
主分类号 |
H01L51/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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