发明名称 LIGHT-EMITTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a flexible semiconductor device by peeling an element produced by a process at a relatively low temperature (lower than 500°C) from a substrate.SOLUTION: A molybdenum film is formed on a glass substrate and a molybdenum oxide film is formed on a surface thereof using an existing apparatus for manufacturing a large-sized glass substrate. A nonmetal inorganic film and an organic compound film are laminated on the molybdenum oxide film, and an element produced by a process at a relatively low temperature (lower than 500°C) is formed on the organic compound film. Then, the element is peeled from the glass substrate.
申请公布号 JP2013153177(A) 申请公布日期 2013.08.08
申请号 JP20130039028 申请日期 2013.02.28
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 JINBO YASUHIRO;ISA TOSHIYUKI;HONDA TATSUYA
分类号 H01L51/50;H01L21/02;H01L21/20;H01L21/336;H01L27/12;H01L29/786;H05B33/02;H05B33/14 主分类号 H01L51/50
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