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发明名称
WAFER WASHING METHOD
摘要
申请公布号
KR20130088896(A)
申请公布日期
2013.08.08
申请号
KR20137018746
申请日期
2011.12.20
申请人
CENTRAL GLASS COMPANY, LIMITED
发明人
KUMON SOICHI;SAIO TAKASHI;ARATA SHINOBU;SAITO MASANORI;NANAI HIDEHISA;AKAMATSU YOSHINORI
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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