| 摘要 |
A substrate safe arrival device and a substrate processing apparatus having the same are provided to minimize non-uniformity of temperature on a susceptor unit due to a disk unit by separating the susceptor unit on which the substrate is received from the disk unit. A substrate(101) is received on plural susceptor units(220). A disk unit(210) supports the susceptor unit. The disk unit includes a body unit, plural through holes, and a support unit. The through hole is prepared in the body unit to be corresponded to the susceptor unit. The support unit is prepared in an upper region of the through hole to support a part of an edge region of the susceptor unit. The susceptor includes a body and a fixing unit. The body corresponds to the through hole. The fixing unit corresponds to the support unit. The susceptor unit and the disk unit include fixing protrusions or fixing grooves. A heat blocking member is formed on a region between the disk unit and a support surface of the susceptor unit. A protrusion unit(211) is formed on a region between the disk unit and the support surface of the susceptor unit. |
