发明名称 |
Anordnung zur Einspeisung von HF-Strom für Rohrkathoden |
摘要 |
An arrangement is provided for feeding in HF current for rotatable tubular cathodes in a vacuum chamber of a plasma coating system as well as a high frequency current source. Located inside the tubular cathode is a magnet arrangement that extends along said tubular cathode for generating a magnetic field. The arrangement enables a low loss infeed of HF current, so that a particularly homogeneous sputter removal from the tubular cathode is guaranteed. The HF current source is coupled to the tubular cathode inside the vacuum chamber by a capacitive infeed of HF current in the form of a coupling capacitor. The coupling capacitor includes a part of the surface of the tubular cathode and a metal plate or metal film that surrounds the tubular cathode, at least partially, at a specified distance. |
申请公布号 |
DE102011086111(A8) |
申请公布日期 |
2013.08.01 |
申请号 |
DE20111086111 |
申请日期 |
2011.11.10 |
申请人 |
FHR ANLAGENBAU GMBH |
发明人 |
GAWER, OLAF;KREHER, SASCHA |
分类号 |
H01J37/32;H01J23/36;H05H7/02 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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