发明名称 Method for trimming a structure obtained by the assembly of two plates
摘要 <p>The method involves selecting a plate (12) among plates presenting sufficient etching resistance with respect to a plate (11). An edge of the plate (11) is etched after fixing the plate (11) on the plate (12), to form a pedestal (16) in the plate (11). The pedestal entirely lies on a contact side of the plate (12). The plate (11) is thinned to the pedestal for providing a thin part for the plate (11).</p>
申请公布号 KR101291086(B1) 申请公布日期 2013.08.01
申请号 KR20077014025 申请日期 2005.12.22
申请人 发明人
分类号 H01L21/762 主分类号 H01L21/762
代理机构 代理人
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