| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a solar cell for properly deactivating the surface of a silicon substrate, reducing carrier recombination on the surface of the silicon substrate so as to achieve higher conversion efficiency.SOLUTION: A manufacturing method of a solar cell includes the steps of: forming a diffusion layer on a light-receiving surface side having conductivity opposite to a first conductivity type on the light-receiving surface side of a first conductivity-type silicon substrate 1; forming a dielectric film 4 that is an anti-reflection film on the diffusion layer 2; and forming a light-receiving surface electrode electrically connected to the diffusion layer. After the diffusion layer is formed and before the dielectric film is formed, the silicon substrate is immersed in a solution containing an amine complex to process the surface of the silicon substrate. |
