发明名称 |
RETAINING RING MONITORING AND CONTROL OF PRESSURE |
摘要 |
<p>A load cup apparatus for transferring a substrate in a processing system includes a pedestal assembly having a substrate support, an actuator, and a controller. The actuator is configured to move the pedestal assembly into a loading position in contact with a retaining ring of a carrier head and to generate a retaining ring thickness signal based on a distance travelled by the pedestal assembly. The controller is configured to receive the retaining ring thickness signal from the actuator.</p> |
申请公布号 |
WO2013112764(A1) |
申请公布日期 |
2013.08.01 |
申请号 |
WO2013US23026 |
申请日期 |
2013.01.24 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CHEN, HUNG CHIH;OSTERHELD, THOMAS H.;GARRETSON, CHARLES C.;FUNG, JASON GARCHEUNG |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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