发明名称 SOLDER BALL MOUNTING APPARATUS AND METHOD
摘要 A solder ball mounting apparatus and a mounting method thereof are provided to reduce a process time by preventing a process error such as a solder ball bridge effect. A solder ball mounting apparatus for mounting solder balls(220) on a semiconductor substrate(230) includes a tray(210) and a lid(250). A plurality of grooves(216) are formed in an inner base surface of the tray. The solder balls are arranged in the grooves. The semiconductor substrate is loaded into a reception space of the tray. The lid is formed to cover the semiconductor substrate. The tray includes a base part(212) and a sidewall(218). The grooves are formed on a surface of the base part. The sidewall is formed at an edge of the base part to form the reception space.
申请公布号 KR101292509(B1) 申请公布日期 2013.08.01
申请号 KR20070014406 申请日期 2007.02.12
申请人 发明人
分类号 H01L21/60;H01L21/673 主分类号 H01L21/60
代理机构 代理人
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