VESSEL INCORPORATING FILM WITH ENHANCED ANTI-STATIC PROPERTIES AND RELATED METHODS
摘要
An apparatus for use in material processing takes the form of a vessel including a wall at least partially formed of a flexible film The film includes at least two layers having an anti-static agent and sandwiching an intermediate layer. Related methods are also disclosed.
申请公布号
EP2477811(A4)
申请公布日期
2013.07.31
申请号
EP20100817817
申请日期
2010.09.16
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.;ATMI NV
发明人
PETHE, VISHWAS;BHELLA, RICHARD;VANHAMEL, STEVEN;MEESTERS, ELS
