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发明名称
PELLICLE CONTAINER
摘要
申请公布号
HK1153825(A1)
申请公布日期
2013.07.26
申请号
HK20110107875
申请日期
2011.07.29
申请人
SHIN-ETSU CHEMICAL CO. LTD.
发明人
JUN HORIKOSHI
分类号
B65D81/107;B65D85/86;G03F1/62;H01L21/027
主分类号
B65D81/107
代理机构
代理人
主权项
地址
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