| 摘要 |
PURPOSE: A substrate processing apparatus is provided to transport a processed substrate by evenly supporting the lower side of the processed substrate with floating force by air which is uniformly sprayed, thereby minimizing vibrations which are generated in the transportation of the processed substrate. CONSTITUTION: A processed substrate is held on a substrate stage (110). A nozzle unit (120) discharges a medicinal fluid from a slit nozzle and sprays the medicinal fluid on the surface of the processed substrate. A floating unit (140) is installed on a transportation path which transports the processed substrate to a second apparatus (30) after a medicinal fluid spray process. The floating unit sprays air to the upper direction and raises the processed substrate. Carriages (130,130') grip the processed substrate from the substrate stage to the second apparatus and move the processed substrate in the floated state. |
