| 摘要 |
PROBLEM TO BE SOLVED: To calculate an abundance ratio and a crystal size of coarse particles in a test sample containing the coarse particles and fine articles by X-ray diffraction.SOLUTION: A locking curve of an arbitrary diffraction surface of a test sample is measured. The area strength of a diffraction line resulting from coarse particles in the locking curve to the entire area strength of the measured locking curve is calculated as an abundance ratio of the coarse particles. In addition, a diffraction angle to an incident X-ray and an incidence angle of the incident X-ray to a sample surface of the test sample are scanned by making fixation to an angle of inclination at which the diffraction line resulting from the coarse particles in the measured locking curve to acquire a diffraction angle to the incidence angle. A crystal size is calculated from Scherrer's equation by using a diffraction angle and half peak width of a diffraction peak resulting from the coarse particles in an acquired diffraction pattern. |
