| 摘要 |
A control apparatus (10) includes a position detection unit (108) which detects a position of a mover of a linear motor (20) based on a change in an output signal from a magnetic sensor (27), a position control unit (102) which calculates a speed command value based on the position of the mover detected by the position detection unit (108) and a position command value of an external input, an estimation unit (150) which estimates a moving speed of the mover from a current value of a current flowing to a plurality of coils of the linear motor (20), a speed control unit (104) which calculates a current command value based on the speed command value and the estimated moving speed, and a power converter (106) which supplies power to the plurality of coils according to the current command value.
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