发明名称 |
Three-dimensional shape measuring apparatus |
摘要 |
The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
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申请公布号 |
US8493570(B2) |
申请公布日期 |
2013.07.23 |
申请号 |
US20080747751 |
申请日期 |
2008.12.10 |
申请人 |
YOU JOON-HO;KANG MINGU;LIM SSANG-GUN;INTEKPLUS CO., LTD. |
发明人 |
YOU JOON-HO;KANG MINGU;LIM SSANG-GUN |
分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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