| 摘要 |
PROBLEM TO BE SOLVED: To allow a holding face of a chuck table for holding a plate-like workpiece and a grinding surface of a grinding stone to be kept in parallel with a high degree of accuracy, in a grinding device.SOLUTION: The grinding device includes: a chuck table 2 that retains a plate-like workpiece in a retaining surface 20; a grinding wheel 32 in which a plurality of grinding stones 34 are bonded in an annular manner; and a wheel mount 31 that has a support surface 312 that detachably supports the grinding wheel 32. The wheel mount 31 includes a height measuring instrument mounting part 310 on which a height gauge 5 that measures the height position of the retaining surface 20 of the chuck table 2 corresponding to the support surface 312 that supports the grinding wheel 32, while the height gauge 5 is brought to scan on the rotational trajectory of the grinding stone 34 on the retaining surface 20 for measuring the height position of the retaining surface 20. The disposing of the height gauge 5 at a position lower than when using a jig improves the measuring accuracy, while bringing the thickness of the plate-like workpiece after grinding to be made further more uniform. |
