| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for manufacturing electrophotographic photoreceptors with different thickness of cylindrical bases, which facilitates a change of program setup, reduces changed components, improves an operation rate, and reduces manufacturing apparatus costs.SOLUTION: A manufacturing device of electrophotographic photoreceptors includes a reaction vessel whose pressure can be reduced, and raw material gas introduction means for introducing a raw material gas for forming a deposition film in the reaction vessel; and generates excited species by exciting the raw material gas introduced in the reaction vessel to form the deposition film on cylindrical bases placed in the reaction vessel. The manufacturing device of electrophotographic photoreceptors has a cylindrical inner wall separated from the side face of the reaction vessel, and arranged so as to surround the cylindrical bases; at least a part on the side of the cylindrical bases of the inner wall is an electrode surface; the inner wall is attachable/detachable to/from the reaction vessel; and a distance from the side face of the reaction vessel to the electrode surface of the inner wall is variable. |
