| 摘要 |
PURPOSE: A device and a method using line beams for measuring the height of a micro bump are provided to measure the height of the micro bump from the base layer on a real time basis by calculating a distance difference between extracted first and second pixel values by an optical triangulation probe. CONSTITUTION: A device using line beams for measuring the height of a micro bump (15) includes a line beam generator (20), a line scan camera (30), and an operation processing unit. The line beam generator generates linear beams, thereby irradiating the same to the top surface of a base layer (10). The line scan camera scans a linear beam irradiation region on the top surface of the base layer. The operation processing unit extracts a first pixel value of the micro bump and a second pixel value of the top surface of the base layer from the line scan camera and measures the height of the micro bump by using the extracted first and second pixel values.
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