METHOD FOR FINDING POSITION, INFORMATION PROCESSING DEVICE, LITHOGRAPHIC DEVICE, AND ARTICLE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique advantageous for correcting a measurement error of an alignment mark.SOLUTION: The method includes: a first step S7002 of finding a first evaluation value indicating a symmetric property of a detection signal at each evaluation position using two windows arranged to sandwich each evaluation position; a second step S7003 of finding a representative position of a mark on the basis of the detection signal or each first evaluation value corresponding to each evaluation position; a third step S7005 of finding a second evaluation value indicating the symmetric property on the basis of the first evaluation value in each of two regions divided by the representative position regarding each first evaluation value; a fourth step S7007 of finding an error from the information indicating a relationship between the error of the representative position and the second evaluation value, and the second evaluation value found in the third step; and a fifth step S7008 of finding a position of the mark by correcting the representative position found in the second step with the error found in the fourth step.