发明名称 |
METHOD FOR PRODUCING TIO2-SIO2 GLASS BODY,METHOD FOR HEAT-TREATING TIO2-SIO2 GLASS BODY,TIO2-SIO2 GLASS BODY,AND OPTICAL BASE FOR EUVL |
摘要 |
<p>The present invention relates to a process for production of a TiO 2 -SiO 2 glass body, comprising: a step of, when an annealing point of a TiO 2 -SiO 2 glass body after transparent vitrification is taken as T 1 (°C), heating the glass body after transparent vitrification at a temperature of T 1 +400°C or more for 20 hours or more; and a step of cooling the glass body after the heating step up to T 1 -400 (°C) from T 1 (°C) in an average temperature decreasing rate of 10°C/hr or less.</p> |
申请公布号 |
EP2441736(A4) |
申请公布日期 |
2013.07.17 |
申请号 |
EP20100777682 |
申请日期 |
2010.05.11 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
KOIKE AKIO;MITSUMORI TAKAHIRO;IWAHASHI YASUTOMI;OGAWA TOMONORI |
分类号 |
C03B19/14;C03B32/00;C03C3/06;C03C3/076;G03F1/24 |
主分类号 |
C03B19/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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