发明名称
摘要 <p>To provide a sensing device using a piezoelectric sensor having an oscillation area for detection and an oscillation area for reference and capable of achieving a high measurement sensitivity by improving shapes of excitation electrodes. On a quartz-crystal piece 20a, there are provided strip-shaped left side area and right side area which are formed symmetrically to be separated from each other into left and right with respect to a center of a circle 53 being a contour of a planar shape of a reaction channel 52 and extend in a longitudinal direction in a parallel manner. Each of the areas is set to have a size in which both corner portions 100 on the left side of the left side area and both corner portions 100 on the right side of the right side area protrude to the outside of the circle 53, the corner portions 100 that protrude to the outside are cut to make the left side area and the right side area position inside of the circle 53, and an excitation electrode 21a for measurement and an excitation electrode 21b for reference are respectively formed on the right side area and the left side area.</p>
申请公布号 JP5240794(B2) 申请公布日期 2013.07.17
申请号 JP20100076194 申请日期 2010.03.29
申请人 发明人
分类号 G01N5/02;G01N9/00;H01L41/08;H01L41/18;H03H9/19 主分类号 G01N5/02
代理机构 代理人
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