发明名称 Replacement apparatus for an optical element
摘要 A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
申请公布号 US8488261(B2) 申请公布日期 2013.07.16
申请号 US201113170951 申请日期 2011.06.28
申请人 KUGLER JENS;SORG FRANZ;WURMBRAND ANDREAS;SCHLETTERER THOMAS;ITTNER THOMAS;CARL ZEISS SMT GMBH 发明人 KUGLER JENS;SORG FRANZ;WURMBRAND ANDREAS;SCHLETTERER THOMAS;ITTNER THOMAS
分类号 G02B7/02;G02B7/00;G02B7/14;G02B13/14;G03F7/20 主分类号 G02B7/02
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