VERTICAL TRANSFER JIG AND APPARATUS FOR WET TREATMENT USING THE SAME

摘要

PURPOSE: A vertical transfer jig and a wet treatment device are provided to prevent generation of uneven flow deviation by rotating a substrate. CONSTITUTION: A vertical transfer jig (100) comprises a body unit (110), a frame (120), and a frame support unit. The body unit (110) is mounted with a substrate in the center. The frame (120) is mounted with the body unit in the center, and rotates the body unit. The frame support unit supports the lower end of the frame so that the frame is positioned in the vertical direction.