发明名称 |
Method for manufacturing three-dimension integrated chip, involves connecting contact surfaces of isolated components with integrated circuit portions of substrate, and removing another substrate from isolated components |
摘要 |
The method involves providing (14) a substrate (16) i.e. silicon wafer, with multiple integrated circuit portions (18a, 18b), which are arranged at predetermined positions. Multiple isolated components (22a, 22b) are applied (20) on another substrate (24). The substrates are placed such that contact surfaces (K22a, K22b) of the isolated components are aligned with the predetermined positions of the circuit portions. The contact surfaces of the isolated components are connected (28) with the circuit portions. The latter substrate is removed (30) from the isolated components. |
申请公布号 |
DE102012200258(A1) |
申请公布日期 |
2013.07.11 |
申请号 |
DE201210200258 |
申请日期 |
2012.01.10 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
RAMM, PETER;KLUMPP, ARMIN |
分类号 |
H01L21/60;H01L21/50 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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