发明名称 |
ISOTOPE ION MICROSCOPE METHODS AND SYSTEMS |
摘要 |
Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, an isotope of Neon is used.
|
申请公布号 |
US2013175444(A1) |
申请公布日期 |
2013.07.11 |
申请号 |
US201313783534 |
申请日期 |
2013.03.04 |
申请人 |
NOTTE, IV JOHN A.;SIJBRANDIJ SYBREN;CARL ZEISS NTS, LLC |
发明人 |
NOTTE, IV JOHN A.;SIJBRANDIJ SYBREN |
分类号 |
H01J37/285;H01J37/317 |
主分类号 |
H01J37/285 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|