| 发明名称 |
Polymer, Resist Material Containing Same, and Method for Forming Pattern Using Same |
| 摘要 |
A polymer containing a repeating unit represented by the following general formula (1) and a repeating unit having an acid-releasable group.
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| 申请公布号 |
US2013177848(A1) |
申请公布日期 |
2013.07.11 |
| 申请号 |
US201113822842 |
申请日期 |
2011.09.09 |
| 申请人 |
KANTO YUSUKE;SUMIDA SHINICHI;MAEDA KAZUHIKO;CENTRAL GLASS COMPANY LIMITED |
发明人 |
KANTO YUSUKE;SUMIDA SHINICHI;MAEDA KAZUHIKO |
| 分类号 |
G03F7/039 |
主分类号 |
G03F7/039 |
| 代理机构 |
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代理人 |
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| 主权项 |
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