APPARATUS FOR COOLING SILICON SINGLE CRYSTAL AND SILICON SINGLE CRYSTAL GROWTH APPARATUS USING THE SAME

摘要

PURPOSE: An apparatus for cooling a silicon crystal and an apparatus for growing the silicon crystal are provided to efficiently absorb radiant heat from a silicon crystal ingot by assembling a plurality of water cooling tubes with different cooling speeds. CONSTITUTION: A water cooling tube assembly support (200) is assembled by laminating a first water cooling tube (300) and a second water cooling tube (400). The first and second water cooling tubes are assembled by a coupling member (210) of the water cooling tube assembly support. The radiant heat absorption rate of the first water cooling tube is different from the radiant heat absorption rate of the second water cooling tube. One of the first and second water cooling tubes is coated with radiant heat absorption materials. The first and second water cooling tubes are coated with ceramics to reduce the contamination of an ingot (100).