| 摘要 |
PURPOSE: A manufacturing device and a method of silicon carbide is provided to easily produce silicon carbide powder with small and even grains by directly reacting silicon monoxide with carbon source particles to produce silicon carbide. CONSTITUTION: A manufacturing device of silicon carbide comprises a reaction part (100), a carbon source supply part (200), and a silicon source supply part (300). The carbon source supply feeds carbon source particles into the reaction part. The silicon source supply part feeds silicon monoxide into the reaction part. A manufacturing method of silicon carbide comprises the steps of: floating carbon source particles in the reaction part, feeding silicon source particles with silicon monoxide into the reaction part (the silicon source is monoxide silicon particles, the monoxide silicon particles are floated in the reaction part, and the silicon source is silicon monoxide gas), and reacting silicon dioxide and carbon to produce silicon monoxide gas.
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