发明名称 SEMICONDUCTOR CHIP AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To enable detection of whether cracks occur in a through electrode array region of a semiconductor chip even when the through electrode array region is formed at a position other than a periphery of the semiconductor chip.SOLUTION: A semiconductor chip comprises: a substrate; a plurality of substrate through electrodes 15 penetrating the substrate; and crack test wiring 18 connecting a first terminal DA and a second terminal VSS in response to a test signal. The crack test wiring 18 is arranged to pass between at least one substrate through electrode 15 of the plurality of substrate through electrodes 15 and a substrate through electrode adjacent to the at least one substrate through electrode 15 in plan view.
申请公布号 JP2013131688(A) 申请公布日期 2013.07.04
申请号 JP20110281517 申请日期 2011.12.22
申请人 ELPIDA MEMORY INC 发明人 NAKAZAWA SHIGEYUKI;ISHIKAWA TORU
分类号 H01L21/66;H01L21/3205;H01L21/768;H01L23/522;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/66
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