发明名称 |
SEMICONDUCTOR CHIP AND SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To enable detection of whether cracks occur in a through electrode array region of a semiconductor chip even when the through electrode array region is formed at a position other than a periphery of the semiconductor chip.SOLUTION: A semiconductor chip comprises: a substrate; a plurality of substrate through electrodes 15 penetrating the substrate; and crack test wiring 18 connecting a first terminal DA and a second terminal VSS in response to a test signal. The crack test wiring 18 is arranged to pass between at least one substrate through electrode 15 of the plurality of substrate through electrodes 15 and a substrate through electrode adjacent to the at least one substrate through electrode 15 in plan view. |
申请公布号 |
JP2013131688(A) |
申请公布日期 |
2013.07.04 |
申请号 |
JP20110281517 |
申请日期 |
2011.12.22 |
申请人 |
ELPIDA MEMORY INC |
发明人 |
NAKAZAWA SHIGEYUKI;ISHIKAWA TORU |
分类号 |
H01L21/66;H01L21/3205;H01L21/768;H01L23/522;H01L25/065;H01L25/07;H01L25/18 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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