SEMICONDUCTOR WAFER MANUFACTURING DEVICE

摘要

The present invention relates to the field of semiconductor wafer manufacturing technologies. A semiconductor wafer manufacturing device comprises: at least two robot arms (1), at least one set of chemical and gas source distribution system (2), and multiple air circulation filter systems (3). The air circulation filter systems (3) are divided into a front region, an intermediate region, and a side region. The front region, the intermediate region, and the side region are controlled by the same motor enabling the regions to reach the homogeneous air volume and pressure. In the present invention, the air circulation filter systems are regionally controlled, so as to improve the cleanliness level of the inside the wafer manufacturing device. In addition, the present invention uses dual-section robot arms of multiple degrees of freedom, which achieves higher delivery efficiency. Moreover, the present invention uses a stable and homogeneous chemical gas and fluid distribution system, thereby achieving higher product yield per unit area.