JIG FOR MOUNTING OR DEMOUNTING A PORT PLATE

摘要

PURPOSE: A jig for attaching and detaching a port plate is provided to reduce a work load because a worker does not need to lift up a port plate when the port plate is installed. CONSTITUTION: A jig for attaching and detaching a port plate comprises a support unit (100). The support unit is formed around the port of a chamber and supports a port plate (20) to the port of the chamber. The support unit comprises a pair of parallel supports (110) and horizontal supports (120). The parallel supports are formed in the chamber. The horizontal supports cross the parallel supports and support the port plate.