| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer robot capable of inhibiting the accumulation of heat to an arm by radiant heat from a substrate or heat transferred by conduction via a hand.SOLUTION: The transfer robot includes a first arm having a base end rotatably coupled to an arm base and having a predetermined drive system internally disposed, and a second arm having a base end rotatably coupled to an end of the first arm. The transfer robot also includes the hand rotatably coupled to an end of the second arm via a hand base and capable of placing the predetermined substrate thereon. A plurality of vents and a single exhaust port are disposed in an arm chassis constituting the first arm. Compressed air spouted from the plurality of vents respectively is discharged from the exhaust port as an air current along an inner wall surface of the arm chassis. |
