发明名称
摘要 A laminating device comprises a stool, a frame body, a release sheet, a drive means, a vacuum pump, and a release sheet carrying means. The frame body faces the stool so as to be contactable with and separable from the stool. The release sheet has an elasticity and is disposed between the stool and the frame body. The drive means moves either the stool or the frame body so that a loading material placed on the stool is covered with the release sheet, and presses the release sheet toward the stool to tightly attach the release sheet to the stool, thereby forming a first space sealed between the stool and the release sheet. The vacuum pump vacuums the first space. The release sheet carrying means carries the release sheet into a region between the stool and the frame body and carries the release sheet out of the region after laminating the loading material.
申请公布号 JP5225164(B2) 申请公布日期 2013.07.03
申请号 JP20090059377 申请日期 2009.03.12
申请人 发明人
分类号 H01L31/042 主分类号 H01L31/042
代理机构 代理人
主权项
地址
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