发明名称 SEMICONDUCTOR DEVICE HAVING POLY-GATE AND METHOD OF FABRICATING THE SAME
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to decrease a poly depletion phenomenon by doping impurity ions in the lower part of a polygate. CONSTITUTION: A gate insulating layer pattern (320) is arranged on a substrate. An amorphous silicon layer pattern (331) is arranged on the gate insulating layer pattern. A polygate has an amorphous silicon layer pattern and a poly silicon layer pattern (333). The amorphous silicon layer pattern has a doping structure including diffusion prevention ions. The diffusion prevention ions restrain the diffusion of impurity ions.
申请公布号 KR20130073673(A) 申请公布日期 2013.07.03
申请号 KR20110141640 申请日期 2011.12.23
申请人 SK HYNIX INC. 发明人 ROUH, KYONG BONG;EUN, YONG SEOK;SON, YOUNG JIN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
代理机构 代理人
主权项
地址
您可能感兴趣的专利