发明名称 |
SEMICONDUCTOR DEVICE HAVING POLY-GATE AND METHOD OF FABRICATING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a method for manufacturing the same are provided to decrease a poly depletion phenomenon by doping impurity ions in the lower part of a polygate. CONSTITUTION: A gate insulating layer pattern (320) is arranged on a substrate. An amorphous silicon layer pattern (331) is arranged on the gate insulating layer pattern. A polygate has an amorphous silicon layer pattern and a poly silicon layer pattern (333). The amorphous silicon layer pattern has a doping structure including diffusion prevention ions. The diffusion prevention ions restrain the diffusion of impurity ions. |
申请公布号 |
KR20130073673(A) |
申请公布日期 |
2013.07.03 |
申请号 |
KR20110141640 |
申请日期 |
2011.12.23 |
申请人 |
SK HYNIX INC. |
发明人 |
ROUH, KYONG BONG;EUN, YONG SEOK;SON, YOUNG JIN |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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