发明名称 Method for molecular adhesion bonding with compensation for radial misalignment
摘要 A method for bonding a first wafer on a second wafer by molecular adhesion, where the wafers have an initial radial misalignment between them. The method includes bringing the two wafers into contact so as to initiate the propagation of a bonding wave between the two wafers while a predefined bonding curvature is imposed on at least one of the two wafers during the contacting step as a function of the initial radial misalignment.
申请公布号 US8475612(B2) 申请公布日期 2013.07.02
申请号 US20100897491 申请日期 2010.10.04
申请人 GAUDIN GWELTAZ;SOITEC 发明人 GAUDIN GWELTAZ
分类号 B32B41/00;B32B37/10 主分类号 B32B41/00
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