发明名称 MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY
摘要 PURPOSE: A method for manufacturing an array substrate for a liquid crystal display is provided to simplify an etching process by using an etchant composition for etching a gate electrode, a gate line, a source/drain electrode, and a data line. CONSTITUTION: After a gate electrode is formed on a substrate, a gate insulating layer is formed on the substrate. A semiconductor layer is formed on the gate insulating layer. A source/drain electrode is formed on the semiconductor layer. A pixel electrode connected to the drain electrode is formed. Using an etching process using an etchant composition, the gate electrode and the source/drain electrode are formed. The etchant composition includes oxidant 1 to 30 weight %, etching control agent 0.1 to 10 weight %, and water.
申请公布号 KR20130071096(A) 申请公布日期 2013.06.28
申请号 KR20110138424 申请日期 2011.12.20
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 JIN, YOUNG JUN
分类号 G02F1/136;C09K13/00 主分类号 G02F1/136
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