ELECTROSTATIC DISCHARGE COMPATIBLE DICING TAPE WITH LASER SCRIBE CAPABILITY
摘要
<p>The present disclosure relates to the field of fabricating microelectronic devices, wherein a microelectronic device substrate, such as a microelectronic wafer, may be diced into individual microelectronic dice using an adhesive tape which reduces the potential of electrostatic discharge damage by the incorporation of anti-static, and may be compatible with a laser scribing process by the incorporation of ultraviolet light absorbing agents into an adhesive layer of the adhesive tape.</p>
申请公布号
WO2013095522(A1)
申请公布日期
2013.06.27
申请号
WO2011US66901
申请日期
2011.12.22
申请人
INTEL CORPORATION;GUPTA, MOHIT;LU, HAIWEI;XU, DINGYING, D.;PATEL, NINAD;BIJJULA, KOWTILYA;POONJOLAI, ERASENTHIRAN, P.
发明人
GUPTA, MOHIT;LU, HAIWEI;XU, DINGYING, D.;PATEL, NINAD;BIJJULA, KOWTILYA;POONJOLAI, ERASENTHIRAN, P.