发明名称 ELECTROSTATIC DISCHARGE COMPATIBLE DICING TAPE WITH LASER SCRIBE CAPABILITY
摘要 <p>The present disclosure relates to the field of fabricating microelectronic devices, wherein a microelectronic device substrate, such as a microelectronic wafer, may be diced into individual microelectronic dice using an adhesive tape which reduces the potential of electrostatic discharge damage by the incorporation of anti-static, and may be compatible with a laser scribing process by the incorporation of ultraviolet light absorbing agents into an adhesive layer of the adhesive tape.</p>
申请公布号 WO2013095522(A1) 申请公布日期 2013.06.27
申请号 WO2011US66901 申请日期 2011.12.22
申请人 INTEL CORPORATION;GUPTA, MOHIT;LU, HAIWEI;XU, DINGYING, D.;PATEL, NINAD;BIJJULA, KOWTILYA;POONJOLAI, ERASENTHIRAN, P. 发明人 GUPTA, MOHIT;LU, HAIWEI;XU, DINGYING, D.;PATEL, NINAD;BIJJULA, KOWTILYA;POONJOLAI, ERASENTHIRAN, P.
分类号 H01L21/48;H01L23/60 主分类号 H01L21/48
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