| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analyzer in which, with respect to samples with different compositions, the propriety of installation state of a sample to a mask hole can be determined appropriately. <P>SOLUTION: The fluorescent X-ray analyzer includes an X-ray source 1 for irradiating a surface 3a of a tabular sample 3 with a primary X-ray 2 through a mask hole 12a, detection means 9 for measuring the intensity of a secondary X-ray 4 resulting from the sample 3, and determination means 10 that compares the intensity of a scattered ray 4 of characteristic X-ray of the primary X-ray measured with the detection means 9 with a predetermined intensity, and determines the propriety of installation state of the sample 3 to the mask hole 12a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
