METHOD FOR MANUFACTURING TARGET GENERATED CHARGED PARTICLE, TARGET STRUCTURE AND TREATMENT APPARATUS USING THE SAME

摘要

PURPOSE: A manufacturing method of a target for generating charged particle, a target structure, and a treatment apparatus using the same are provided to generate charged particle with high energy. CONSTITUTION: A manufacturing method of a target for generating charged particle comprises a step of forming a source layer(12) on a substrate(10); a step of forming balls(13) on the source layer; a step of forming a metal thin film(14) on the source layer; and a step of forming holes exposing the source layers form the metal thin film, by removing the balls. The target comprises a substrate; a source layer formed on the substrate; and a metal thin film having holes locally exposing the source layer.