| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure the three-dimensional shape of an object of measurement by detecting change in a polarization state of an object of inclination due to irradiation and determining the direction of inclination of the object of measurement. <P>SOLUTION: First irradiation means 10 irradiates an object 1 of measurement with circular polarized light, and first imaging means 20 images regularly reflected light from the object 1 of measurement to the irradiation means 10 through an analyzer 22. Second irradiation means 30 irradiates the object 1 of measurement obliquely with light, and second imaging means 40 images the object 1 of measurement from a direction different from the irradiation direction of the light from the second irradiation means 30. Analyzing means 50 finds an angle of inclination of the object 1 of measurement to a reference plane and a virtual azimuth angle from the polarization state by using the output of the first imaging means 20. Further, the analyzing means 50 corrects the virtual azimuth angle by using the output of the first imaging means 20 and the image picked up by the second imaging means 40, and calculates an azimuth angle as the direction of inclination of a region of the object 1 of measurement which is inclined to the reference plane. <P>COPYRIGHT: (C)2013,JPO&INPIT |
