发明名称 |
ELECTROMECHANICAL TRANSDUCING DEVICE AND MANUFACTURING METHOD THEREOF, AND LIQUID DROPLET DISCHARGING HEAD AND LIQUID DROPLET DISCHARGING APPARATUS |
摘要 |
A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film.
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申请公布号 |
US2013162726(A1) |
申请公布日期 |
2013.06.27 |
申请号 |
US201113821378 |
申请日期 |
2011.09.05 |
申请人 |
MIZUKAMI SATOSHI;AKIYAMA YOSHIKAZU;SHINKAI MASARU;MACHIDA OSAMU;RICOH COMPANY, LTD. |
发明人 |
MIZUKAMI SATOSHI;AKIYAMA YOSHIKAZU;SHINKAI MASARU;MACHIDA OSAMU |
分类号 |
H01L41/29;B41J2/045;H01L41/08 |
主分类号 |
H01L41/29 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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