发明名称 |
ALIGNMENT MARK AND METHOD OF MANUFACTURING THE SAME |
摘要 |
An alignment mark includes a plurality of mark units. Each mark unit includes a first element and a plurality of second elements. Each second element includes opposite first and second end portions. The plurality of second elements are arranged along a direction. The first element extends adjacent to the first end portions of the plurality of second elements and parallel to the direction of the plurality of second elements.
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申请公布号 |
US2013161841(A1) |
申请公布日期 |
2013.06.27 |
申请号 |
US201113333272 |
申请日期 |
2011.12.21 |
申请人 |
CHIANG CHEN KU;WU YUAN HSUN;NAN YA TECHNOLOGY CORPORATION |
发明人 |
CHIANG CHEN KU;WU YUAN HSUN |
分类号 |
H01L23/544;H01L21/308 |
主分类号 |
H01L23/544 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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