| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the apparatus tact time of a photo spacer height inspection apparatus. <P>SOLUTION: The photo spacer height inspection apparatus measures the height of a photo spacer by: receiving, from a film thickness monitoring apparatus, film thickness measurement values of any of R, G, or B pixels for each measurement coordinate of color filter substrates, and storing the values; storing correlation data indicating a correlation between the film thickness value of any of the R, G, or B pixels which serves as a Base plane and a Z position where a camera is focused; reading the film thickness measurement value of any of the R, G, or B pixels which serves as the Base plane for each measurement coordinate of a color filter substrate carried in; and moving the camera to each measurement coordinate, obtaining the Z position where the camera is focused at each measurement coordinate from the film thickness measurement value of any of the R, G, or B pixels which serves as the Base plane on the basis of the correlation data, and moving the camera to the Z position thus obtained. <P>COPYRIGHT: (C)2013,JPO&INPIT |
