| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for inspecting the adhesion state of a seed crystal, which has high precision. <P>SOLUTION: An object to be inspected IS having a seed crystal 11, an adhesive layer 30 to which the seed crystal 11 adheres, and a support part 41 to which the seed crystal 11 adheres by the adhesive layer 30 is prepared. The surface to be inspected SS of the object to be inspected IS is irradiated with an ultrasonic wave UL so that the wave transmits through either of the seed crystal 11 and the support part 41, and reaches the adhesive layer 30. Distribution of the attenuation constant of the reflected wave RF of the ultrasonic wave on the surface to be inspected SS is calculated. <P>COPYRIGHT: (C)2013,JPO&INPIT |
