| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a solid-state imaging device capable of effectively improving degradation in transfer efficiency caused by an unsharpened waveform of a drive signal for driving a vertical transfer part without increase in the number of manufacturing steps. <P>SOLUTION: A solid-state imaging device has: a plurality of pixel parts; and a plurality of vertical transfer parts transferring signal charge generated by the pixel parts in a vertical direction. In the solid-state imaging device, the pixel parts and the vertical transfer parts form an imaging region. In the solid-state imaging device, the vertical transfer parts 121-125 are formed so as to be overlapped with a vertical transfer channel region, and respectively have orientation regions R1-R5 inclining potential levels formed at the vertical transfer channel region so as to decide a transfer direction of the signal charge. Planar shapes of the orientation regions are set so that the inclination of each potential level at the plurality of vertical transfer parts becomes gentler as the position of each vertical transfer part becomes closer to a central part of the imaging region. <P>COPYRIGHT: (C)2013,JPO&INPIT |
