| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional measuring device capable of improving measurement accuracy and shortening a measurement time when performing a three-dimensional measurement using a phase shift method. <P>SOLUTION: A substrate inspection device 1 comprises: an irradiation devices 4A, 4B for irradiating a printed-circuit board 2 with stripe-shaped light patterns; a camera 5 for taking an image thereof; and a control device 6 for performing a three-dimensional measurement on the basis of the taken image data. The irradiation devices 4A, 4B include light sources 4Aa, 4Ba and liquid-crystal shutters 4Ab, 4Bb forming gratings for converting the light into the stripe-shaped light patterns. The control device 6 executes first image-taking processing under a first light pattern of the first irradiation device 4A, starts a grating switch of the liquid-crystal shutter 4Ab simultaneously with the completion of the first image-taking processing, executes second image-taking processing under a second light pattern of the second irradiation device 4B without waiting for the completion of the grating switch, starts a grating switch of the liquid-crystal shutter 4Bb simultaneously with the completion of the second image-taking processing, and executes subsequent first image-taking processing without waiting for the completion of the grating switch. <P>COPYRIGHT: (C)2013,JPO&INPIT |
