| 摘要 |
<p>PURPOSE: A tray structure of a substrate processing device is provided to stably maintain a substrate by forming a dual groove with a first groove and a second groove on a plurality of cells. CONSTITUTION: A plurality of cells mounts a substrate. A tray main body(10) forms the plurality of cells. The plurality of cells correspond to the shape of the substrate. A first groove(21) is cut with a concave shape from the upper surface of the tray main body. A second groove(22) forms a height difference with the first groove.</p> |
